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ULVAC Model LR600

Here we offer a ULVAC dry vacuum pump.
ULVAC dry vacuum pump
Solution for demanding process applications
Dry vacuum pump
ULVAC's unique approach to utilizing the latent heat within the
pump body enables the LR/HR/UR series to
deliver performance even in the most demanding processes.
ULVAC has focused its design efforts on maintaining
an extremely uniform, high temperature across all pump stages,
optimizing this pump family for CVD and etching applications.
Compatible with the ULVAC ECO-SHOCK system for additional energy savings.
Features:
The LR series pump is designed for load lock chambers and PVD processes.
ULVAC's unique aluminum design enables very uniform temperature distribution throughout the pump body:
The ULVAC LR series pump is designed for applications that require a heated pump, heated gas lines, and/or heated exhaust lines.
Excellent helium pumping capacity
Sealed motor for safety and ease of maintenance
Withstands power interruptions of up to 500 ms.
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Internal components are specially treated to ensure a high degree of surface hardness and excellent corrosion resistance.
This prevents the wear of internal pump parts when exposed to corrosive gases.
(LR series)
Designed for process gases that generate powdery byproducts, such as Si crystal growth furnaces.
Pre-pump for turbo-molecular and mechanical booster pumps
Type: LR600
Condition: new
Scope of supply: (See image)
(Subject to changes and errors in technical data and specifications!)
We would be happy to answer any further questions you may have by telephone.

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